Terrasanta, G.; Müller, M.; Sommer, T.; Geprägs, S.; Gross, R.; Althammer, M.; Poot, M.: Growth of Aluminum Nitride on a Silicon Nitride Substrate for Hybrid Photonic Circuits. 2021Materials for Quantum Technology: 1. https://www.doi.org/10.1088/2633-4356/ac08ed