TY - GEN
AU - Terrasanta, G.
AU -  Müller, M.
AU -  Sommer, T.
AU -  Geprägs, S.
AU -  Gross, R.
AU -  Althammer, M.
AU -  Poot, M.
T1 - Growth of Aluminum Nitride on a Silicon Nitride Substrate for Hybrid Photonic Circuits
CY - 
PY - 2021
PB - 
T3 - Materials for Quantum Technology
VL - 1
UR - https://www.doi.org/10.1088/2633-4356/ac08ed