@article{id_14853,
title = "Growth of Aluminum Nitride on a Silicon Nitride Substrate for Hybrid Photonic Circuits",
author = "Terrasanta, G. and Müller, M. and Sommer, T. and Geprägs, S. and Gross, R. and Althammer, M. and Poot, M.",
journal = "Materials for Quantum Technology",
volume = "1",
year = "2021",
pages = "021002-021002",
url = "https://www.doi.org/10.1088/2633-4356/ac08ed",
}