@article{id_5208,
title = "Fabrication technology of and symmetry breaking in superconducting quantum circuits",
author = "T. Niemczyk, F. Deppe, M. Mariantoni, E. P. Menzel, E. Hoffmann, G. Wild, L. Eggenstein, A. Marx, R. Gross",
journal = "Superconductor Science & Technology",
volume = "22",
year = "2009",
pages = "034009",
url = "http://dx.doi.org/10.1088/0953-2048/22/3/034009",
}