TY - GEN
AU - U. Schoop, M. Schonecke, S. Thienhaus, S. Schymon, L. Alff, R. Gross
T1 - Role of ion beam etching in the fabrication of ramp-type junctions
CY - 
PY - 2001
PB - 
T3 - Physica C
VL - 351
UR - http://dx.doi.org/10.1016/S0921-4534(00)01630-0
SN - 0921-4534