TY - GEN
AU - T. Niemczyk, F. Deppe, M. Mariantoni, E. P. Menzel, E. Hoffmann, G. Wild, L. Eggenstein, A. Marx, R. Gross
T1 - Fabrication technology of and symmetry breaking in superconducting quantum circuits
CY - 
PY - 2009
PB - 
T3 - Superconductor Science & Technology
VL - 22
UR - http://dx.doi.org/10.1088/0953-2048/22/3/034009
SN - 0953-2048