@article{id_5400,
title = "Role of ion beam etching in the fabrication of ramp-type junctions",
author = "U. Schoop, M. Schonecke, S. Thienhaus, S. Schymon, L. Alff, R. Gross",
journal = "Physica C",
volume = "351",
year = "2001",
url = "http://dx.doi.org/10.1016/S0921-4534(00)01630-0",
}